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Measuring the Thickness of Material Layers Removed from a Sample in an Electron Microscope
Kutálek, Jiří ; Hříbek, David (oponent) ; Čadík, Martin (vedoucí práce)
The motivation for this thesis arises from the aim of the Thermo Fisher Scientific company to develop a method for the measurement of thickness of material layers removed from a sample in an electron microscope. The primary goal of this work is to propose a more effective measurement method, from a practical point of view, compared to the existing ones. Besides, the secondary goal is finding a way to obtain a ground truth for the measurement, to be able to evaluate the proposed solution. This thesis introduces two new measurement methods, based on detecting a sample edge from images, and proposes an approach for obtaining the ground truth, lying in carving tiny circular features into the sample surface and detecting and counting their numbers in acquired images. I created three different datasets of images for evaluating the performance of the methods. The experimental results show that one of the proposed methods, the Top-Down FIB, measures consistent values, which are close to the expected average and performs slightly better than the state-of-the-art method, when compared to the ground truth. Moreover, the algorithm counting the circular features in image appears to be usable for obtaining the ground truth, as it produces more stable results than a ground truth created by manually annotating the data.
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